Side Effects RF Capacitive Heating.

ESD effects in capacitive RF MEMS switches

RF MEMS have shown very attractive characteristics in automotive, communication, aeronautic and aerospace applications, thanks to its low mass and volume, low losses, low power consumption, high isolation and a wide operative frequency range. Moreover they have demonstrated good integration with electronics which show their ability to built-in innovative RF architectures [1]. Nevertheless the a...

Alpha particle radiation effects in RF MEMS capacitive switches

0026-2714/$ see front matter 2008 Elsevier Ltd. A doi:10.1016/j.microrel.2008.06.047 * Corresponding author. Address: LAAS CNRS, 7, Toulouse Cedex 4, France. Tel.: +33 561337900; fax: E-mail address: [email protected] (G. Papaioannou) The paper investigates the effect of 5 MeV alpha particle irradiation in RF MEMS capacitive switches with silicon nitride dielectric film. The investigation includ...

Mechanical Design of RF MEMS Capacitive Switches

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

A Review of Rf Heating

The funadmental aspects of RF heating theory is reviewed and a summary of recent experimental results are given. All frequency regimes are covered, from very low frequency magnetic pumping to electron cyclotron resonance heating.

Time Characterization of Capacitive Mems Rf Switches